MEMS (micro-electro-mechanical systems) or simply micro-systems are miniaturized structures that perform one or more optical, mechanical, electronic, thermal or magnetic functions on a single chip. These systems sense, control and actuate on a micro scale and can function individually or can be arrayed to generate effects on a macro scale. The multi-physics nature of these problems makes MEMS design very challenging. The Abaqus Unified FEA and Multiphysics product suites from SIMULIA allow MEMS designers and manufacturers to optimize the performance of these devices.
Native Solution Capabilities
- Unified modeling and simulation environment based on Abaqus/CAE
- Accurate simulation including prestress effects for modal and buckling simulations
- Simulation methods to allow robust coupled-field analyses of thermal, electrical, mechanical (both static and dynamic), piezoelectric and moisture-sensitivity load regimes
Partner Solution Capabilities
The challenging multi-physics nature of these problems has led to the development of design tools that specifically address the needs of this emerging community. SIMULIA partners with leading providers of commercial MEMS design software providing the finite element capability for performing structural, thermal and piezoelectric analysis of MEMS devices. These MEMS design codes also enable additional multiphysics couplings by linking the Abaqus solver to other solvers to electro-mechanical and fluid structure interactions.